Detail of the stiffness and weight compensation modules
Parallelogram with Al₂O₃ bridge and actutator coil

Instrument base ø250x90mm, machined with 5-axis milling machine
Amplifiers, PC104 controller and Zygo^® ZMI4004 measurement board
IME Technologies / TUE-GTD

Fold mirrors for the laser beam delivery system
Sampleholder fabrication in progress

Zerodur^® measurement mirror with coated mirror surfaces.
Thickness 9mm, hole ø25mm, weight 25g.
Prototype of the Lorentz actuator with weight and stiffness compensation

Instrument as presented at Euspen 2009, San Sebastian
Unloading the sampleholder with a bellow-type vacuumgripper
(Pen-VAC^®), dummy sample ø15x4mm