General |
|
| degrees of freedom | three mutually orthogonal translations |
| stroke | 1 x 1 x 1 mm |
| resolution | <1 nm |
| accuracy | nm – range |
| overall dimensions | ø250 x 190 mm |
Instrument characteristics |
|
| straight guide | parallel elastic |
| actuation | lorentz-type with |
| weight and stiffness compensation | |
| measurement system | - custom differential plane mirror interferometers |
| - monolithic zerodur® mirrors | |
| - beam delivery optics integrated in instrument | |
| other | - kinematic sampleholder |
| - internal transportation lock | |
| - transport case and dust cover | |
Electronics |
|
| amplifier | 18 bit linear current type (TUE-GTD) |
| controller | PC104 with remote workstation (IME-technologies) |
| measurement | Zygo®
ZMI4004 board with fiber-optic pickups, Zygo® 7702 HeNe-laser with ø3mm beam |
CONTACT
| Telephone: | +31 40 247 4580 |
| Mobile: | +31 650 483 500 |
| Fax: | +31 848 395 498 |
| Email: | info(at)nanostage3d.com |